Design of a polysilicon-on-insulator pressure sensor with original polysilicon layout for harsh environment
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials
Reference10 articles.
1. Piezoresistive pressure sensors based on polycrystalline silicon
2. High-temperature polysilicon pressure microsensor
3. Self-compensating piezoresistive pressure sensor
4. Temperature compensation of piezoresistive pressure sensors
5. Application of aluminum films as temperature sensors for the compensation of output thermal shift of silicon piezoresistive pressure sensors
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