Funder
National Science Foundation
Defense Advanced Research Projects Agency
Publisher
Springer Science and Business Media LLC
Subject
Mechanical Engineering,Computational Mechanics
Reference58 articles.
1. Basu, A.K., Basu, A., Ghosh, S., Bhattacharya, S.: MEMS Applications in Electronics and Engineering. AIP Publishing, Melville, NY (2023)
2. Yeatman, E.M.: Applications of MEMS in power sources and circuits. J. Micromech. Microeng. 17, S184 (2007)
3. Haque, M.A., Saif, M.T.A.: A review of MEMS-based microscale and nanoscale tensile and bending testing. Exp. Mech. 43, 248–255 (2003)
4. Kahn, H.: Mechanical properties of micromachined structures. In: Bhushan, B. (ed.) Handbook of Nanotechnology, pp. 1685–1702. Springer, Berlin, Germany (2007)
5. Sharma, N., Hooda, M., Sharma, S.K.: Synthesis and characterization of LPCVD polysilicon and silicon nitride thin films for MEMS applications. J. Mater. 2014, 954618 (2014)
Cited by
1 articles.
订阅此论文施引文献
订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献