Detailed investigation of the surface mechanisms and their interplay with transport phenomena in alumina atomic layer deposition from TMA and water
Author:
Publisher
Elsevier BV
Subject
Applied Mathematics,Industrial and Manufacturing Engineering,General Chemical Engineering,General Chemistry
Reference34 articles.
1. Parameter space of atomic layer deposition of ultrathin oxides on graphene;Aria;ACS Appl. Mater. Interfaces,2016
2. CHEMKIN-PRO 15131, 2013. Reaction Design: San Diego.
3. Outgassing behavior on aluminum surfaces: water in vacuum systems;Chen;J. Vacuum Sci. Technol. A: Vacuum Surf. Films,1994
4. Reaction mechanisms for atomic layer deposition of aluminum oxide on semiconductor substrates;Delabie;J. Vacuum Sci. Technol. A: Vacuum Surf. Films,2012
5. Surface chemistry of Al2O3 deposition using Al(CH3)3 and H2O in a binary reaction sequence;Dillon;Surf. Sci.,1995
Cited by 38 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Examination of nonideal film growth in batch atomic layer deposition for plasma-resistant coatings;Journal of Vacuum Science & Technology A;2024-09-09
2. Towards a mechanistic understanding of the floating catalyst CVD of CNTs: Interplay between catalyst particle nucleation, growth and deactivation;Chemical Engineering Science;2024-08
3. Growth of Carbon Nanofibers and Carbon Nanotubes by Chemical Vapour Deposition on Half-Heusler Alloys: A Computationally Driven Experimental Investigation;Materials;2024-06-27
4. Improved uniformity of atomic-layer-deposited HfO2 film along the length of glass monocapillary with high length-diameter ratio;Optical Materials;2024-06
5. Exploring TMA and H2O Flow Rate Effects on Al2O3 Thin Film Deposition by Thermal ALD: Insights from Zero-Dimensional Modeling;Coatings;2024-05-07
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3