Surface chemistry of Al2O3 deposition using Al(CH3)3 and H2O in a binary reaction sequence
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics
Reference53 articles.
1. Atomic layer epitaxy
2. Atomic layer epitaxy
3. Diethylsilane Decomposition on Silicon Surfaces Studied Using Transmission FTIR Spectroscopy
4. Adsorption and decomposition of diethylgermane on porous silicon surfaces
5. Molecular Layer Epitaxy
Cited by 433 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Exploring TMA and H2O Flow Rate Effects on Al2O3 Thin Film Deposition by Thermal ALD: Insights from Zero-Dimensional Modeling;Coatings;2024-05-07
2. Effect of Co-Reactants on Interfacial Oxidation in Atomic Layer Deposition of Oxides on Metal Surfaces;ACS Applied Materials & Interfaces;2024-03-20
3. Optimizing Atomic Layer Deposition Processes with Nanowire‐Assisted TEM Analysis;Advanced Materials Interfaces;2024-02-29
4. Al2O3 atomic layer deposition on a porous matrix of carbon fibers (FiberForm) for oxidation resistance;Journal of Vacuum Science & Technology A;2023-11-27
5. Introducing a Robust Flexible Conductive Hybrid: Indium Oxide-ParyleneC Obtained by Vapor Phase Infiltration;Chemistry of Materials;2023-09-18
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3