Is electronic spin angular momentum conserved in gas-surface interactions? F and F+ with Si(100)
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics
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4. Spectroscopic studies of fluorescent emission in plasma etching of silicon nitride;Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures;1988-03
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