Author:
Wu M.F.,Vantomme A.,Pattyn H.,Langouche G.,Maex K.,Vanhellemont J.
Subject
Surfaces, Coatings and Films,Condensed Matter Physics,Surfaces and Interfaces,General Physics and Astronomy,General Chemistry
Cited by
9 articles.
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1. Compound Phase Formation in Thin Film Structures;Critical Reviews in Solid State and Materials Sciences;1999-03
2. Structural study of YSi[sub 1.7] layers formed by channeled ion beam synthesis;Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures;1998-07
3. Epitaxial CoSi2 formation on Si(001) from an amorphous Co75W25 sputtered layer;Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures;1992-09
4. Influence of implantation defects on the nucleation and growth of CoSi2 precipitates;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1992-05
5. Single and double buried epitaxial metallic layers in Si prepared by ion implantation;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1992-01