Formation of silicide thin films by solid state reaction
Author:
Publisher
Elsevier BV
Subject
Surfaces, Coatings and Films,Condensed Matter Physics,Surfaces and Interfaces,General Physics and Astronomy,General Chemistry
Reference64 articles.
1. Reactive diffusion in thin films
2. VLSI Science and Technology;d'Heurle,1982
3. Synthesis and properties of epitaxial semiconducting silicides
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