Thermal stability of WSiN-GaAs and Au-WSiN interfaces
Author:
Publisher
Elsevier BV
Subject
Surfaces, Coatings and Films,Condensed Matter Physics,Surfaces and Interfaces,General Physics and Astronomy,General Chemistry
Reference5 articles.
1. Thin Films — Interdiffusion and Reactions,1978
2. Characterization of WSix/GaAs Schottky contacts
3. Thermal stability of WSix/GaAs interface
4. Physics of Semiconductor Devices;Sze,1981
5. Diffusion barriers in thin films
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4. Threshold voltage shift in 0.1 μm self-aligned-gate GaAs MESFETs under bias stress and related degradation of ultra-high-speed digital ICs;Microelectronics Reliability;1999-12
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