Supercritical Carbon Dioxide in Microelectronics Manufacturing: Marginal Cradle-to-grave Emissions

Author:

Supekar Sarang D.,Skerlos Steven J.

Publisher

Elsevier BV

Subject

General Medicine

Reference26 articles.

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3. A hybrid life cycle inventory of nano-scale semiconductor manufacturing;Krishnan;Environ. Sci. Technol.,2008

4. Krishnan N, Williams ED, Boyd SB. Case studies in energy use to realize ultra-high purities in semiconductor manufacturing. 2008 IEEE Int. Symp. Electron. Environ. IEEE; 2008. p. 1-6.

5. Life-Cycle Assessment of Semiconductors;Boyd,2011

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