A Hybrid Life Cycle Inventory of Nano-Scale Semiconductor Manufacturing-Reference-Cited by-同舟云学术

A Hybrid Life Cycle Inventory of Nano-Scale Semiconductor Manufacturing

Published:2008-03-19 Issue:8 Volume:42 Page:3069-3075
ISSN:0013-936X
Container-title:Environmental Science & Technology
language:en
Short-container-title:Environ. Sci. Technol.

Author:

Krishnan Nikhil¹,Boyd Sarah¹,Somani Ajay¹,Raoux Sebastien¹,Clark Daniel¹,Dornfeld David¹

Affiliation:

1. Columbia University, New York, NY, University of California, Berkeley, CA, Massachusetts Institute of Technology, Cambridge, MA, Transcarbon International, San Francisco CA, and Applied Materials Inc., Santa Clara, CA

Publisher

American Chemical Society (ACS)

Subject

Environmental Chemistry,General Chemistry

Link

https://pubs.acs.org/doi/pdf/10.1021/es071174k

Reference26 articles.

1. The 1.7 Kilogram Microchip: Energy and Material Use in the Production of Semiconductor Devices

2. Development of Parametric Material, Energy, and Emission Inventories for Wafer Fabrication in the Semiconductor Industry

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