Development of Parametric Material, Energy, and Emission Inventories for Wafer Fabrication in the Semiconductor Industry-Reference-Cited by-同舟云学术

Development of Parametric Material, Energy, and Emission Inventories for Wafer Fabrication in the Semiconductor Industry

Published:2003-10-31 Issue:23 Volume:37 Page:5373-5382
ISSN:0013-936X
Container-title:Environmental Science & Technology
language:en
Short-container-title:Environ. Sci. Technol.

Author:

Murphy Cynthia F.¹,Kenig George A.¹,Allen David T.¹,Laurent Jean-Philippe¹,Dyer David E.¹

Affiliation:

1. Center for Energy and Environmental Resources (R7100), University of Texas, Austin, Texas 78758, and International SEMATECH, 2706 Montopolis Drive, Austin, Texas 78741

Publisher

American Chemical Society (ACS)

Subject

Environmental Chemistry,General Chemistry

Link

https://pubs.acs.org/doi/pdf/10.1021/es034434g

Reference22 articles.

1. Peer Reviewed: Design Through the 12 Principles of Green Engineering

2. The 1.7 Kilogram Microchip: Energy and Material Use in the Production of Semiconductor Devices

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