Opportunities and perspectives for green chemistry in semiconductor technologies
Author:
Affiliation:
1. University of Technology Sydney
2. Faculty of Engineering and IT
3. School of Electrical and Data Engineering
4. Australia
5. Applied Materials
6. Inc.
7. Santa Clara
8. USA
Abstract
Semiconductor technologies offer a plethora of technological challenges and opportunities for a more extensive implementation of green chemistry principles.
Publisher
Royal Society of Chemistry (RSC)
Subject
Pollution,Environmental Chemistry
Link
http://pubs.rsc.org/en/content/articlepdf/2019/GC/C9GC01058K
Reference48 articles.
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