Case studies in energy use to realize ultra-high purities in semiconductor manufacturing-Reference-Cited by-同舟云学术

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Case studies in energy use to realize ultra-high purities in semiconductor manufacturing

Published:2008-05 Issue: Volume: Page:
ISSN:
Container-title:2008 IEEE International Symposium on Electronics and the Environment
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Author:

Krishnan Nikhil,Williams Eric D.,Boyd Sarah B.

Publisher

IEEE

Link

http://xplorestaging.ieee.org/ielx5/4555641/4562842/04562913.pdf?arnumber=4562913

Cited by 5 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. The Application of AI for Electronic LCA Data and Assessment Toward the Circular Economy;2024 Electronics Goes Green 2024+ (EGG);2024-06-18

2. The Environmental Footprint of IC Production: Review, Analysis, and Lessons From Historical Trends;IEEE Transactions on Semiconductor Manufacturing;2023-02

3. Supercritical Carbon Dioxide in Microelectronics Manufacturing: Marginal Cradle-to-grave Emissions;Procedia CIRP;2014

4. Semiconductor Manufacturing;Green Manufacturing;2012-11-03

5. Semiconductor LCI Methods;Life-Cycle Assessment of Semiconductors;2011-08-01

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