Synthesis and characterization of microcrystalline diamond to ultrananocrystalline diamond films via Hot Filament Chemical Vapor Deposition for scaling to large area applications-Reference-Cited by-同舟云学术

Synthesis and characterization of microcrystalline diamond to ultrananocrystalline diamond films via Hot Filament Chemical Vapor Deposition for scaling to large area applications

Published:2016-03 Issue: Volume:603 Page:62-68
ISSN:0040-6090
Container-title:Thin Solid Films
language:en
Short-container-title:Thin Solid Films

Author:

Fuentes-Fernandez E.M.A.,Alcantar-Peña J.J.,Lee G.,Boulom A.,Phan H.,Smith B.,Nguyen T.,Sahoo S.,Ruiz-Zepeda F.,Arellano-Jimenez M.J.,Gurman Pablo,Martinez-Perez C.A.,Yacaman M.J.,Katiyar R.S.,Auciello O.

Funder

National Science Foundation

RD Research & Technology SA de CV

Publisher

Elsevier BV

Subject

Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials

Reference39 articles.

1. Status review of the science and technology of ultrananocrystalline diamond (UNCD™) films and application to multifunctional devices;Auciello;Diam. Relat. Mater.,2010

2. Low temperature growth of ultrananocrystalline diamond;Xiao;J. Appl. Phys.,2004

3. Ultrananocrystalline diamond thin films for MEMS and moving mechanical assembly devices;Krauss;Diam. Relat. Mater.,2001

4. Materials science and fabrication processes for a new MEMS technology based on ultrananocrystalline diamond thin films;Auciello;J. Phys. Condens. Matter,2004

5. Synthesis, Properties and Applications of Ultrananocrystalline Diamond;Gruen,2015

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