Quantum chemistry model of surface reactions and kinetic model of diamond growth: Effects of CH3 radicals and C2H2 molecules at low-temperatures CVD

Author:

Barsukov Yu.,Kaganovich I.D.,Mokrov M.,Khrabry A.

Funder

US Department of Energy

Publisher

Elsevier BV

Reference139 articles.

1. Low-pressure, metastable growth of diamond and “diamondlike” phases;Angus;Science,1988

2. Current issues and problems in the chemical vapor deposition of diamond;Yarbrough;Science,1990

3. Methyl versus acetylene as diamond growth species;Harris;J. Mater. Res.,1990

4. Theory and models for nucleation and growth of diamond films;Frenklach,1991

5. Thin film diamond growth mechanisms;Butler;Phil. Trans. R. Soc. Lond. A,1993

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