Impact of negative bias on the piezoelectric properties through the incidence of abnormal oriented grains in Al0.62Sc0.38N thin films-Reference-Cited by-同舟云学术

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Impact of negative bias on the piezoelectric properties through the incidence of abnormal oriented grains in Al0.62Sc0.38N thin films

Published:2020-03 Issue: Volume:697 Page:137819
ISSN:0040-6090
Container-title:Thin Solid Films
language:en
Short-container-title:Thin Solid Films

Author:

Sandu C.S.^ORCID,Parsapour F.,Xiao D.,Nigon R.,Riemer L.M.,LaGrange T.,Muralt P.^ORCID

Funder

Swiss Commission for Technology and Innovation

Hasler

BioWings

Swiss National Science Foundation

Publisher

Elsevier BV

Subject

Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials

Reference29 articles.

1. Enhancement of piezoelectric response in scandium aluminum nitride alloy thin films perpared by dual reactive cosputtering;Akiyama;Adv. Mater.,2009

2. influence of growth temperature and scandium concentration on piezoelectric response of ScAlN alloy thin films;Akiyama;Appl. Phys. Lett.,2009

3. Piezoelectric AlScN thin films: a semiconductor compatible solution for mechanical energy harvesting and sensors;Matloub;Appl. Phys. Lett.,2013

4. Influence of Sc concentration on power generation figure of merit of ScAlN thin films;Akiyama;Appl. Phys. Lett.,2013

5. Stress controlled pulsed direct current co-sputtered AlScN as piezoelectric phase for micromechanical sensor applications;Fichtner;APL Mater.,2015

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1. Deposition of highly crystalline AlScN thin films using synchronized high-power impulse magnetron sputtering: From combinatorial screening to piezoelectric devices;Physical Review Materials;2024-09-13

2. Piezoelectric and elastic properties of Al0.60Sc0.40N thin films deposited on patterned metal electrodes;Journal of Vacuum Science & Technology A;2024-05-15

3. Study of AlScN thin film deposition on large size silicon wafer;Thin Solid Films;2024-03

4. Measurement and Analysis of Longitudinal and Transversal Effective Piezoelectric Coefficients (d_33,f and e_31,f) in 100 nm-500 nm Sc_0.3Al_0.7N films;2023 IEEE International Ultrasonics Symposium (IUS);2023-09-03

5. Preparation, Characterization, and Application of AlN/ScAlN Composite Thin Films;Micromachines;2023-02-27

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