Measurement and Analysis of Longitudinal and Transversal Effective Piezoelectric Coefficients (d33,f and e31,f) in 100 nm-500 nm Sc0.3Al0.7N films-Reference-Cited by-同舟云学术

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Measurement and Analysis of Longitudinal and Transversal Effective Piezoelectric Coefficients (d_33,f and e_31,f) in 100 nm-500 nm Sc_0.3Al_0.7N films

Published:2023-09-03 Issue: Volume: Page:
ISSN:
Container-title:2023 IEEE International Ultrasonics Symposium (IUS)
language:
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Author:

Liu Chen¹,Varghese Binni¹,Liu Patrick Peng¹,Lin Huamao¹,Li Minghua¹,Zhu Yao¹

Affiliation:

1. Agency for Science, Technology and Research (A*STAR),Institute of Microelectronics,Singapore

Funder

Science and Engineering Research Council

Publisher

IEEE

Link

http://xplorestaging.ieee.org/ielx7/10306337/10306342/10306779.pdf?arnumber=10306779

Reference12 articles.

1. Piezoelectric actuation of PZT thin-film diaphragms at static and resonant conditions

2. Measurement of piezoelectric coefficients of ferroelectric thin films

3. Evaluation of the impact of abnormal grains on the performance of Sc_0.15Al_0.85N-based BAW resonators and filters

4. Compensation of the Stress Gradient in Physical Vapor Deposited Al1−xScxN Films for Microelectromechanical Systems with Low Out-of-Plane Bending

5. Impact Of High Sc Content On Crystal Morphology And RF Performance Of Sputtered Al1-xScxN SMR BAW

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1. Thin-Film Piezoelectric Micromachined Ultrasound Transducers in Biomedical Applications: A Review;IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control;2024-06

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