Impact Of High Sc Content On Crystal Morphology And RF Performance Of Sputtered Al1-xScxN SMR BAW
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Publisher
IEEE
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http://xplorestaging.ieee.org/ielx7/8914674/8925542/08925777.pdf?arnumber=8925777
Cited by 12 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Compressive stress reduction in sputter-deposited yttrium aluminum nitride (Y0.2Al0.8N) thin films for BAW resonators with high electromechanical coupling;Sensors and Actuators A: Physical;2024-10
2. Highly Doped Single Crystal Al$_{\text{1}-\textit{x}}$Sc$_{\textit{x}}$N Bulk Acoustic Resonators for High-Frequency and Wideband Applications;IEEE Transactions on Electron Devices;2024
3. Boosting Performance of SAW Resonator via AlN/ScAlN Composite Films and Dual Reflectors;IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control;2023-10
4. Measurement and Analysis of Longitudinal and Transversal Effective Piezoelectric Coefficients (d33,f and e31,f) in 100 nm-500 nm Sc0.3Al0.7N films;2023 IEEE International Ultrasonics Symposium (IUS);2023-09-03
5. Effect of Scandium Composition on the Phonon Scattering Lifetime of Aluminum Scandium Nitride Acoustic Wave Resonators;2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS);2023-01-15
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