Highly Doped Single Crystal Al$_{\text{1}-\textit{x}}$Sc$_{\textit{x}}$N Bulk Acoustic Resonators for High-Frequency and Wideband Applications-Reference-Cited by-同舟云学术

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Highly Doped Single Crystal Al$_{\text{1}-\textit{x}}$Sc$_{\textit{x}}$N Bulk Acoustic Resonators for High-Frequency and Wideband Applications

Published:2024 Issue: Volume: Page:1-7
ISSN:0018-9383
Container-title:IEEE Transactions on Electron Devices
language:
Short-container-title:IEEE Trans. Electron Devices

Author:

Zhou Congquan¹^ORCID,Dou Wentong¹^ORCID,Qin Ruidong¹,Lu Jinghong¹^ORCID,Yang Yumeng²^ORCID,Mu Zhiqiang¹^ORCID,Yu Wenjie¹

Affiliation:

1. Shanghai Institute of Microsystem and Information Technology, State Key Laboratory of Materials for Integrated Circuits, Chinese Academy of Sciences, Shanghai, China

2. School of Information Science and Technology, ShanghaiTech University, Shanghai, China

Funder

Shanghai Technology Innovation Project

National Natural Science Foundation of China

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Link

http://xplorestaging.ieee.org/ielx8/16/4358746/10643880.pdf?arnumber=10643880

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