Issues of contact etching and pre-treatment in Schottky contact-Reference-Cited by-同舟云学术

Issues of contact etching and pre-treatment in Schottky contact

Published:2009-05 Issue:14 Volume:517 Page:3844-3846
ISSN:0040-6090
Container-title:Thin Solid Films
language:en
Short-container-title:Thin Solid Films

Author:

Lee Haksun,Shin Kyoungsub,Cho Nammyun,Min Gyungjin,Kang Changjin,Han Woosung,Moon Jootae

Publisher

Elsevier BV

Subject

Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials

Reference20 articles.

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5. M. Sekine, N. Itoh, T. Akimoto, T. Shinmura, D.T.C. Huo, Y. Kakuhara, K. Kajiyana, Y. Yamada, K. Yamazaki, Y. Murao (1992), Extended Abstr. of the Int. Conf. on Solid State Devices and Mater., Tsukuba 184.

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