Structural and dielectric investigation of thermal treated TiO2/ZrO2 composite thin films grown by chemical beam vapor deposition
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials
Reference50 articles.
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Cited by 2 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献
1. Synthesis of titanium dioxide thin films via thermo- and plasma-enhanced atomic layer deposition;Applied Surface Science;2024-11
2. A spectroscopic ellipsometry study of TiO2:ZrO2 on TiN/Si thin films prepared by Chemical Beam Vapor Deposition;Surface and Interface Analysis;2024-08-09
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