Dielectric property and conduction mechanism of ultrathin zirconium oxide films
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1418265
Reference22 articles.
1. Thermal stability of ultrathin ZrO2 films prepared by chemical vapor deposition on Si(100)
2. Structure and stability of ultrathin zirconium oxide layers on Si(001)
3. Trends in DRAM dielectrics
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