The impact of sputter conditions on the microstructure and on the resistivity of tantalum thin films
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials
Reference34 articles.
1. Tantalum thin film resistors
2. Applications of resistive thin films in electronics
3. Enhanced thermal stability of TA-based thin diffusion barriers by ion implantation
4. Tantalum as a diffusion barrier between copper and silicon: Failure mechanism and effect of nitrogen additions
5. Failure Mechanism of Amorphous and Crystalline Ta-N Films in the Cu/Ta-N/Ta/SiO[sub 2] Structure
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