Affiliation:
1. Chaozhou Branch of Chemistry and Chemical Engineering Guangdong Laboratory, Chaozhou 521000, China
2. State Key Laboratory of Advanced Technology for Materials Synthesis and Processing, Wuhan University of Technology, Wuhan 430070, China
3. Hubei Key Laboratory of Advanced Technology for Automotive Components, Wuhan University of Technology, Wuhan 430070, China
Abstract
Ta hard coatings were prepared on PCrNi1MoA steel substrates by direct current magnetron sputtering, and their growth and phase evolution could be controlled by adjusting the substrate temperature (Tsub) and sputtering power (Pspu) at various conditions (Tsub = 200–400 °C, Pspu = 100–175 W). The combined effect of Tsub and Pspu on the crystalline phase, surface morphology, and mechanical properties of the coatings was investigated. It was found that higher Pspu was required in order to obtain α-Ta coatings when the coatings are deposited at lower Tsub, and vice versa, because the deposition energy (controlled by Tsub and Pspu simultaneously) within a certain range was necessary. At the optimum Tsub with the corresponding Pspu of 200 °C-175 W, 300 °C-150 W, and 400 °C-100 W, respectively, the single-phased and homogeneous α-Ta coatings were obtained. Moreover, the α-Ta coating deposited at Tsub-Pspu of 400 °C-100 W showed a denser surface and a finer grain, and as a result exhibited higher hardness (9 GPa), better toughness, and larger adhesion (18.46 N).
Funder
Guangdong Major Project of Basic and Applied Basic Research
ational Key R&D Program of China
Self-innovation Research Funding Project of Hanjiang Laboratory
Subject
General Materials Science,Metals and Alloys
Cited by
1 articles.
订阅此论文施引文献
订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献