Author:
Juneja Jasbir S.,Wang Pei-I,Karabacak Tansel,Lu T.-M.
Subject
Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials
Reference19 articles.
1. Proc. IEEE International Interconnect Technology Conference;Brillouet,2005
2. Vapor Deposition of Low-Dielectric-Constant Polymeric Thin Films
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