Fiber texture of sputter deposited molybdenum films and structural zone model

Author:

Chen L.,Shimpi P.,Lu T.-M.,Wang G.-C.

Publisher

Elsevier BV

Subject

Condensed Matter Physics,General Materials Science

Reference50 articles.

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2. Influence of apparatus geometry and deposition conditions on structure and topography of thick sputtered coatings;Thornton;J. Vac. Sci. Technol.,1974

3. Revised structure zone model for thin-film physical structure;Messier;J. Vac. Sci. Technol. A Vac. Surf. Films,1984

4. Diagnostics and Applications of Thin Films: Proceedings of the International Summer School, 27th May–5th June 1991;Eckertová,1992

5. Modified structure zone model to describe the morphological evolution of ZnO thin films deposited by reactive sputtering;Mirica;Cryst. Growth Des.,2004

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