Local anodic oxidation by atomic force microscopy for nano-Raman strain measurements on silicon–germanium thin films-Reference-Cited by-同舟云学术

登录注册会员服务联系我们

Local anodic oxidation by atomic force microscopy for nano-Raman strain measurements on silicon–germanium thin films

Published:2010-04 Issue:12 Volume:518 Page:3267-3272
ISSN:0040-6090
Container-title:Thin Solid Films
language:en
Short-container-title:Thin Solid Films

Author:

Kolanek Krzysztof,Hermann Peter,Dudek Piotr T.,Gotszalk Teodor,Chumakov Dmytro,Weisheit Martin,Hecker Michael,Zschech Ehrenfried

Publisher

Elsevier BV

Subject

Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials

Reference45 articles.

1. Strained Si, SiGe, and Ge channels for high-mobility metal-oxide-semiconductor field-effect transistors

2. Hole mobility in silicon inversion layers: Stress and surface orientation

3. Physics of strain effects in semiconductors and metal-oxide-semiconductor field-effect transistors

4. Nano-Raman spectroscopy with metallized atomic force microscopy tips on strained silicon structures

5. Solutions to a proximity effect in high resolution electron beam induced deposition

Cited by 5 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Scanning Near-Field Gap-Mode Microscopy;Handbook of Spectroscopy;2014-04-02

2. Evaluation of Kink Generation Rate and Step Flow Velocity on Si(111) during Wet Etching;Japanese Journal of Applied Physics;2013-11-01

3. Semiconductors and Semiconducting Devices;Handbook of Nanoscopy;2012-05-23

4. Imaging and strain analysis of nano-scale SiGe structures by tip-enhanced Raman spectroscopy;Ultramicroscopy;2011-11

5. Effects of patterning induced stress relaxation in strained SOI/SiGe layers and substrate;Journal of Applied Physics;2011-06-15

同舟云学术

1.学者识别学者识别

2.学术分析学术分析

3.人才评估人才评估

"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370

www.globalauthorid.com

TOP

Copyright © 2019-2024 北京同舟云网络信息技术有限公司
京公网安备11010802033243号京ICP备18003416号-3