Author:
DeNardis D.,Rosales-Yeomans D.,Borucki L.,Philipossian A.
Subject
Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials
Reference44 articles.
1. Chemical Mechanical Planarization of Microelectronic Materials;Steigerwald,1997
2. Metallization;Murarka,1993
3. Robust operation of copper chemical mechanical polishing
Cited by
35 articles.
订阅此论文施引文献
订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献