Subject
Electrochemistry,General Chemical Engineering,Analytical Chemistry
Reference65 articles.
1. Wet Chemical Processes for BEOL Technology;Peethala,2022
2. Advances in Chemical Mechanical Planarization (CMP);Babu,2016
3. Chapter 5 - Post-CMP Cleaning;Chen,2018
4. Probing the mechanisms of metal CMP using tribo-electroanalytical measurements: results for a copper/malonate system;Wei;ECS J. Solid State Sci. Technol.,2021
5. An alkaline slurry design for Co-Cu CMP systems evaluated in the tribo-electrochemical approach;Johnson;ECS J. Solid State Sci. Technol.,2018