Compositionally tunable optical properties of hafnium titanium oxide films deposited by atomic layer deposition without intermediate surface hydroxylation
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials
Reference30 articles.
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4. Synthesis and surface engineering of complex nanostructures by atomic layer deposition;Knez;Adv. Mater.,2007
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