Review Article: Recommended reading list of early publications on atomic layer deposition—Outcome of the “Virtual Project on the History of ALD”

Author:

Ahvenniemi Esko1,Akbashev Andrew R.2,Ali Saima3,Bechelany Mikhael4,Berdova Maria5,Boyadjiev Stefan6,Cameron David C.7,Chen Rong8,Chubarov Mikhail9,Cremers Veronique10,Devi Anjana11,Drozd Viktor12,Elnikova Liliya13,Gottardi Gloria14,Grigoras Kestutis15,Hausmann Dennis M.16,Hwang Cheol Seong17,Jen Shih-Hui18,Kallio Tanja19,Kanervo Jaana20,Khmelnitskiy Ivan21,Kim Do Han22,Klibanov Lev23,Koshtyal Yury24,Krause A. Outi I.3,Kuhs Jakob10,Kärkkänen Irina25,Kääriäinen Marja-Leena26,Kääriäinen Tommi27,Lamagna Luca28,Łapicki Adam A.29,Leskelä Markku30,Lipsanen Harri31,Lyytinen Jussi3,Malkov Anatoly32,Malygin Anatoly32,Mennad Abdelkader33,Militzer Christian34,Molarius Jyrki35,Norek Małgorzata36,Özgit-Akgün Çağla37,Panov Mikhail38,Pedersen Henrik39,Piallat Fabien40,Popov Georgi30,Puurunen Riikka L.15,Rampelberg Geert10,Ras Robin H. A.41,Rauwel Erwan42,Roozeboom Fred43,Sajavaara Timo44,Salami Hossein45,Savin Hele31,Schneider Nathanaelle46,Seidel Thomas E.47,Sundqvist Jonas48,Suyatin Dmitry B.49,Törndahl Tobias50,van Ommen J. Ruud51,Wiemer Claudia52,Ylivaara Oili M. E.15,Yurkevich Oksana53

Affiliation:

1. Department of Chemistry, Aalto University, P.O. Box 16100, FI-00076 Espoo, Finland

2. Department of Materials Science and Engineering, Stanford University, Stanford, California 94305

3. Department of Materials Science and Engineering, Aalto University School of Chemical Technology, P.O. Box 16200, FI-00076 Aalto, Finland

4. Institut Européen des Membranes IEM UMR-5635, Université de Montpellier, ENSCM, CNRS, Place Eugène Bataillon, F-34095 Montpellier Cedex 5, France

5. Industrial Focus Group XUV Optics, University of Twente, 7522 ND Enschede, The Netherlands

6. Institute of Solid State Physics, Bulgarian Academy of Sciences, 72 Tzarigradsko chaussee blvd., 1784 Sofia, Bulgaria

7. CEPLANT, Masaryk University, Kotlářská 267/2, 611 37 Brno, Czech Republic

8. School of Mechanical Science and Engineering, School of Optical and Electronic Information, Huazhong University of Science and Technology, 1037 Luoyu Road, Wuhan, Hubei 430074, People's Republic of China

9. Univ. Grenoble Alpes, CNRS, SIMAP, F-38000 Grenoble, France

10. Department of Solid State Sciences, CoCooN, Ghent University, Krijgslaan 281/S1, 9000 Ghent, Belgium

11. Inorganic Materials Chemistry, Ruhr University Bochum, Bochum, 44801, Germany

12. Institute of Chemistry, St.-Petersburg State University, Universitetskaya emb. 7/9., St.-Petersburg 199034, Russian Federation

13. Institute for Theoretical and Experimental Physics, Bolshaya Cheremushkinskaya 25, Moscow 117218, Russian Federation

14. Fondazione Bruno Kessler, Center for Materials and Microsystems, 38123 Trento, Italy

15. VTT Technical Research Centre of Finland, P.O. Box 1000 (Tietotie 3, Espoo), FI-02044 VTT, Finland

16. Lam Research Corporation, Tualatin, Oregon 97062

17. Department of Materials Science and Engineering, and Inter-university Semiconductor Research Center, College of Engineering, Seoul National University, Seoul 08826, South Korea

18. Globalfoundries, Albany, New York 12203

19. Department of Chemistry, School of Chemical Engineering, Aalto University, P.O. Box 16100, FI-00076 Aalto, Finland

20. Åbo Akademi, FI-20500 Turku, Finland and Department of Chemistry, School of Chemical Engineering, Aalto University, P.O. Box 16100, FI-00076 Aalto, Finland

21. Research and Education Center “Nanotechnology,” Saint Petersburg Electrotechnical University «LETI», ul. Professora Popova 5, St. Petersburg 197376, Russian Federation

22. Department of Chemical Engineering, Massachusetts Institute of Technology, 77 Massachusetts Ave., Cambridge, Massachusetts 02139

23. Techinsights, 3000 Solandt Road, Ottawa, Ontario K2K2X2, Canada

24. Laboratory of Lithium-Ion Technology, Ioffe Institute, 26 Politekhnicheskaya, St Petersburg 194021, Russian Federation

25. Sentech Instruments GmbH, Schwarzschildstr.2, 12489 Berlin, Germany

26. NovaldMedical Ltd Oy, Telkäntie 5, Kitee FI-82500, Finland

27. Laboratory of Inorganic Chemistry, University of Helsinki, P.O. Box 55 (A.I.Virtasen aukio 1), FI-00014 Helsinki, Finland and NovaldMedical Ltd. Oy, Telkäntie 5, 82500 Kitee, Finland

28. STMicroelectronics, Via C. Olivetti 2, 20864 Agrate Brianza (MB), Italy

29. Seagate Technology (Ireland), 1 Disc Drive, Derry BT48 7BD, Northern Ireland

30. Department of Chemistry, University of Helsinki, P.O. Box 55, FI-00014 Helsinki, Finland

31. Department of Micro- and Nanosciences, Aalto University, Tietotie 3, 02150 Espoo, Finland

32. Department of Chemical Nanotechnology and Materials for Electronics, St. Petersburg State Institute of Technology (Technical University), 26 Moskovsky prosp., St. Petersburg 190013, Russia

33. Unité de Développement des Equipements Solaires, UDES/Centre de Développement des Energies Renouvelables, CDER, RN 11 B.P. 386 Bou-Ismail, 42415 Tipaza, Algeria

34. Physical Chemistry, Institute of Chemistry, Technische Universität Chemnitz, Straße der Nationen 62, 09111 Chemnitz, Germany

35. Summa Semiconductor Oy, PL 11, 02131 Espoo, Finland

36. Department of Advanced Materials and Technologies, Faculty of Advanced Technologies and Chemistry, Military University of Technology, Str. Kaliskiego 2, 00-908 Warszawa, Poland

37. ASELSAN Inc.–Microelectronics, Guidance and Electro-Optics Business Sector, Ankara 06750, Turkey

38. Centre of Microtechnology and Diagnostics, Saint Petersburg Electrotechnical University «LETI», ul. Professora Popova 5, St. Petersburg 197376, Russian Federation

39. Department of Physics, Chemistry and Biology, Linköping University, SE-581 83 Linköping, Sweden

40. KOBUS, 38330 Montbonnot Saint Martin, France

41. Department of Applied Physics, Aalto University, Puumiehenkuja 2, 02150 Espoo, Finland

42. Tartu College, Tallinn University of Technology, Puiestee 78, 51008 Tartu, Estonia

43. Department of Applied Physics, Group Plasma and Materials Processing, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands and TNO, High Tech Campus 21, 5656 AE Eindhoven, The Netherlands

44. Department of Physics, University of Jyvaskyla, P.O. Box 35, 40014 Jyväskylä, Finland

45. Department of Chemical and Biomolecular Engineering, University of Maryland, College Park, Maryland 20742

46. IRDEP-CNRS, 6 quai Watier, 78401 Chatou, France and IPVF, 8 rue de la Renaissance, 92160 Antony, France

47. Seitek50, POB 350238, Palm Coast, Florida 32135

48. System Integration and Technology Transfer, Fraunhofer Institute for Ceramic Technologies and Systems IKTS, Winterbergstr. 28, 01277 Dresden, Germany

49. Division of Solid State Physics and NanoLund, Lund University, Box 118, SE-221 00 Lund, Sweden

50. Solid State Electronics, Uppsala University, P.O. Box 534, SE-751 21 Uppsala, Sweden

51. Department of Chemical Engineering, Delft University of Technology, Van der Maasweg 9, 2629 HZ Delft, The Netherlands

52. Laboratorio MDM, IMM-CNR, via C. Olivetti 2, 20864 Agrate Brianza (MB), Italy

53. Research and Educational Center “Functional Nanomaterials,” Immanuel Kant Baltic Federal University, A. Nevskogo 14, 236041 Kaliningrad, Russia

Funder

Luonnontieteiden ja Tekniikan Tutkimuksen Toimikunta (Forskningsrådet för Naturvetenskap och Teknik)

Publisher

American Vacuum Society

Subject

Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics

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