From V. B. Aleskovskii's “Framework” Hypothesis to the Method of Molecular Layering/Atomic Layer Deposition-Reference-Cited by-同舟云学术

From V. B. Aleskovskii's “Framework” Hypothesis to the Method of Molecular Layering/Atomic Layer Deposition

Published:2015-12 Issue:10-11-12 Volume:21 Page:216-240
ISSN:0948-1907
Container-title:Chemical Vapor Deposition
language:en
Short-container-title:Chem. Vap. Deposition

Author:

Malygin Anatolii A.¹,Drozd Victor E.²,Malkov Anatolii A.¹,Smirnov Vladimir M.²

Affiliation:

1. Saint Petersburg State Technological Institute (Technical University), Department of Chemical Nanotechnology and Electronics Engineering; Materials; 26 Moskovsky prosp St. Petersburg 190013 Russian Federation

2. Saint Petersburg State University, Department of Solid State Chemistry; 7-9, Universitetskaya nab. St. Petersburg 199034 Russian Federation

Publisher

Wiley

Subject

Process Chemistry and Technology,Surfaces and Interfaces,General Chemistry

Link

http://onlinelibrary.wiley.com/wol1/doi/10.1002/cvde.201502013/fullpdf

Reference187 articles.

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