Effects of ion implantation on the microstructure and residual stress of filter arc CrN films-Reference-Cited by-同舟云学术

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Effects of ion implantation on the microstructure and residual stress of filter arc CrN films

Published:2008-06 Issue:16 Volume:516 Page:5330-5333
ISSN:0040-6090
Container-title:Thin Solid Films
language:en
Short-container-title:Thin Solid Films

Author:

Weng Ko-Wei,Chen Ya-Chi,Han Sheng,Hsu Chih-Sheng,Chen Yung-Lin,Wang Da-Yung

Publisher

Elsevier BV

Subject

Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials

Reference7 articles.

1. Recent advances in vacuum arc ion sources

2. Industrialization of MEVVA source ion implantation

3. Hardness, wear and microstructure of carbon implanted AISI M2 high speed steel

4. Tribological enhancement of CrN coatings by niobium and carbon ion implantation

5. Residual stress measurement in textured thin film by grazing-incidence X-ray diffraction

Cited by 6 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Engineering Stress in Thin Films: An Innovative Pathway Toward 3D Micro and Nanosystems;Small;2021-12-07

2. High temperature wettability of ion implanted multicomponent CrAlSiN films by molten glass;Surface and Coatings Technology;2013-12

3. Tribological Behavior of Ion Implanted AISI 440C Stainless Steel under Oil Lubricated Condition;Applied Mechanics and Materials;2013-10

4. Effect of nitrogen flow ratios on the structure and mechanical properties of (TiVCrZrY)N coatings prepared by reactive magnetron sputtering;Applied Surface Science;2010-12

5. Nanostructured CrN thin films prepared by reactive pulsed DC magnetron sputtering;Materials Science and Engineering: B;2010-02

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