Industrialization of MEVVA source ion implantation-Reference-Cited by-同舟云学术

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Industrialization of MEVVA source ion implantation

Published:2000-06 Issue: Volume:128-129 Page:1-8
ISSN:0257-8972
Container-title:Surface and Coatings Technology
language:en
Short-container-title:Surface and Coatings Technology

Author:

Tonghe Zhang,Huixing Zhang,Changzhou Ji,Xiaoji Zhang,Yuguang Wu,Furong Ma,Hong Liang,Hanzhang Shou,Jianzhong Shi

Publisher

Elsevier BV

Subject

Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry

Reference14 articles.

1. Ion beam processing for industrial applications

2. Full length article

3. Current status of commercial ion implantation in Spain

4. High current metal-ion source for ion implantation;Huixing;Rev. Sci. Instrum.,1990

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