High‐current metal‐ion source for ion implantation
Author:
Publisher
AIP Publishing
Subject
Instrumentation
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1141921
Reference9 articles.
1. Ion Implanting Bearing Surfaces for Corrosion Resistance
2. The amorphous phase and surface mechanical properties of 304 stainless steel implanted with Ti and C
3. Manufacturing technology program to develop a production ion implantation facility for processing bearings and tools
4. The Metal Vapor Vacuum ARC (MEVVA) High Current Ion Source
5. Metal vapor vacuum arc ion source
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1. Structure and properties of tetrahedral amorphous carbon films implanted with Ti ion;Surface and Coatings Technology;2007-02
2. Development of multicathode high flux metal ion plasma sources in Korea;Review of Scientific Instruments;2004-09
3. Nanostructure and Properties of Corrosion Resistance in C+Ti Multi-Ion-Implanted Steel;Chinese Physics Letters;2003-08-29
4. Characterization of surface enhancement of carbon ion-implanted TiN coatings by metal vapor vacuum arc ion implantation;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2002-10
5. Effect of ion energy on degradation of diamond-like carbon films exposed to high-energy bombardment from an ion implanter;Diamond and Related Materials;2002-07
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