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Residual stress measurement in textured thin film by grazing-incidence X-ray diffraction

  • Published:2002-10 Issue:2 Volume:418 Page:73-78
  • ISSN:0040-6090
  • Container-title:Thin Solid Films
  • language:en
  • Short-container-title:Thin Solid Films

Author:

Ma C.-H.,Huang J.-H.,Chen Haydn

Publisher

Elsevier BV

Subject

Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials

Reference15 articles.

1. The tension of metallic films deposited by electrolysis

2. Residual Stress Measurement by X-Ray Diffraction,1971

3. Residual Stress, Measurement by Diffraction and Interpretation;Noyan,1987

4. Structural analysis of tin films by Seemann-Bohlin X-ray diffraction

5. Seeman–Bohlin X-ray diffractometer for thin films
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