Influence of generation control of the magnetron plasma on structure and properties of copper nitride layers-Reference-Cited by-同舟云学术

Influence of generation control of the magnetron plasma on structure and properties of copper nitride layers

Published:2020-01 Issue: Volume:694 Page:137731
ISSN:0040-6090
Container-title:Thin Solid Films
language:en
Short-container-title:Thin Solid Films

Author:

Nowakowska - Langier Katarzyna^ORCID,Skowronski Lukasz,Chodun Rafał,Okrasa Sebastian,Strzelecki Grzegorz W.,Wilczopolska Magdalena,Wicher Bartosz,Mirowski Robert,Zdunek Krzysztof

Publisher

Elsevier BV

Subject

Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials

Reference21 articles.

1. Copper nitride layers synthesized by pulsed magnetron sputtering;Nowakowska - Langier;Thin Solid Films,2018

2. Relation between modulation frequency of electric power oscillation during pulse magnetron sputtering deposition of MoNx thin films;Wicher;Appl. Surf. Sci.,2018

3. Phase composition of copper nitride coatings examined by the use of x - ray diffraction and raman spectroscopy;Nowakowska - Langier;J. Mol. Struct.,2018

4. Influence of modulation frequency on the synthesis of thin films in pulsed magnetron sputtering processes;Strzelecki;Mater. Sci. - Pol.,2018

5. Structure of cu–n layers synthesized by pulsed magnetron sputtering with variable frequency of plasma generation;Nowakowska - Langier;Nucl. Instrum. Methods Phys. Res. B: Beam Interact. Mater. Atoms,2017

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