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Phase composition of copper nitride coatings examined by the use of X-ray diffraction and Raman spectroscopy

  • Published:2018-08 Issue: Volume:1165 Page:79-83
  • ISSN:0022-2860
  • Container-title:Journal of Molecular Structure
  • language:en
  • Short-container-title:Journal of Molecular Structure

Author:

Nowakowska-Langier Katarzyna,Chodun Rafal,Minikayev Roman,Okrasa Sebastian,Strzelecki Grzegorz W.,Wicher Bartosz,Zdunek Krzysztof

Funder

Narodowe Centrum Nauki

Publisher

Elsevier BV

Subject

Inorganic Chemistry,Organic Chemistry,Spectroscopy,Analytical Chemistry

Reference29 articles.

1. Copper nitride and tin nitride thin films for write-once optical recording media;Maruyama;J. Appl. Phys.,1996

2. Thermal decomposition of copper nitride thin films and dots formation by electron beam writing;Nosaka;Appl. Surf. Sci.,2001

3. Thermal stability of copper nitride films prepared by rf magnetron sputtering;Liu;Thin Solid Films,1998

4. Covalent nitrides for maskless laser writing of microscopic metal lines;Maya;MRS Proc.,1992

5. Properties of various sputter-deposited Cu–N thin films;Wang;J. Vac. Sci. Technol. A,1998
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