Thermal stability of copper nitride films prepared by rf magnetron sputtering-Reference-Cited by-同舟云学术

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Thermal stability of copper nitride films prepared by rf magnetron sputtering

Published:1998-07 Issue:1-2 Volume:325 Page:55-59
ISSN:0040-6090
Container-title:Thin Solid Films
language:en
Short-container-title:Thin Solid Films

Author:

Liu Z.Q,Wang W.J,Wang T.M,Chao S,Zheng S.K

Publisher

Elsevier BV

Subject

Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials

Reference8 articles.

1. M. Hansen, K. Anderko, Constitution of Binary Alloys, McGraw-Hill, New York, 1985.

2. Heteroepitaxial growth of Cu3N thin films

3. Copper nitride thin films prepared by radio‐frequency reactive sputtering

4. Covalent Nitrides for Maskless Laser Writing of Microscopic Metal Lines

5. Heteroepitaxial growth of Cu3N thin films

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