Author:
Brunet M.,Kotb H. Mafhoz,Bouscayrol L.,Scheid E.,Andrieux M.,Legros C.,Schamm-Chardon S.
Funder
French National Research Agency
Subject
Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials
Reference38 articles.
1. Integrated Passive Component Technology;Ulrich,2003
2. International Symposium on Microelectronics, Baltimore, U.S.A., October 9 11 2001;Roozeboom,2001
3. A novel capacitor technology based on porous silicon
4. Ultrahigh Capacitance Density for Multiple ALD-Grown MIM Capacitor Stacks in 3-D Silicon
Cited by
29 articles.
订阅此论文施引文献
订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献