Influence of an Alternating Phase on the Electron Heating in Capacitively Coupled Radio-Frequency Discharges
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Publisher
Springer Nature Singapore
Link
https://link.springer.com/content/pdf/10.1007/978-981-19-6223-3_17
Reference13 articles.
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3. Missaoui A, El kaouini M, Chatei H (2021) Numerical study of the effect of applied voltage on simultaneous modes of electron heating in RF capacitive discharges. J Lect Notes Electr Eng 681:285–291. https://doi.org/10.1007/978-981-15-6259-4_29
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5. Zhao L, Liu Y, Samir T (2017) Effects of gas pressure on plasma characteristics in dual frequency argon capacitive glow discharges at low pressure by a self-consistent fluid model. J Phys Plasmas 26:125201. https://doi.org/10.1088/1674-1056/26/12/125201
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