A novel measurement method for the torque acting on the upper platen in a three-way double-sided lapping/polishing machine

Author:

Hashimoto Yohei,Ozaki Ryo,Furumoto TatsuakiORCID,Hosokawa Akira

Publisher

Elsevier BV

Subject

General Engineering

Reference17 articles.

1. Characterization of the double sided polishing process;Klamecki;Adv Info Storage Syst,1995

2. A study of the effects of polishing parameters on material removal rate and non-uniformity;Lin;Int J Mach Tool Manufact,2002

3. Experimental investigation on processing technology of sapphire substrates with double-sided planetary grinding;Wang,2017

4. The theory and design of plate glass polishing machines;Preston;J Soc Glass Technol,1927

5. A kinematic analysis of disk motion in a double sided polisher for chemical mechanical planarization (CMP);Kasai;Tribol Int,2008

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