Formation mechanism of concave and convex surface shapes in double-sided lapping-Reference-Cited by-同舟云学术

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Formation mechanism of concave and convex surface shapes in double-sided lapping

Published:2022-11 Issue: Volume:309 Page:117749
ISSN:0924-0136
Container-title:Journal of Materials Processing Technology
language:en
Short-container-title:Journal of Materials Processing Technology

Author:

Pan Bo,Kang Renke,Zhu Xu,Du Dongxing,Huang Wen,Guo Jiang

Funder

Science Challenge Project

National Natural Science Foundation of China

Science Fund for Creative Research Groups

Publisher

Elsevier BV

Subject

Industrial and Manufacturing Engineering,Metals and Alloys,Computer Science Applications,Modeling and Simulation,Ceramics and Composites

Reference35 articles.

1. Investigation of the trajectory uniformity in water dissolution ultraprecision continuous polishing of large-sized KDP crystal;Cheng;Int. J. Extrem. Manuf.,2020

2. A case for 2-body material removal in prime LED sapphire substrate lapping and polishing;Gagliardi;J. Manuf. Process,2013

3. Theoretical and experimental investigation of chemical mechanical polishing of W-Ni-Fe alloy;Guo;Int. J. Extrem. Manuf.,2021

4. A novel method for workpiece deformation prediction by amending initial residual stress based on SVR-GA;Guo;Adv. Manuf.,2021

5. A novel measurement method for the torque acting on the upper platen in a three-way double-sided lapping/polishing machine;Hashimoto;Precis. Eng.,2021

Cited by 9 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. A novel lapping method for ultraprecision cylindrical rollers based on precision evolution;Journal of Materials Processing Technology;2024-03

2. Kinematics and trajectory analysis of swinging fixed abrasive plane lapping: Effect of swinging mode on the lapping uniformity;Precision Engineering;2024-03

3. Effect of pad surface morphology on the surface shape of the lapped workpiece;Precision Engineering;2024-01

4. Theoretical and experimental analysis for the surface shape evolution of ultrathin workpiece considering the pad surface shape in double-sided polishing;Materials Science in Semiconductor Processing;2024-01

5. Effect of the vibration displacement responses on end grinding processed surface height;The International Journal of Advanced Manufacturing Technology;2023-11-28

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