1. Tribology and Mechanics of Magnetic Storage Devices;Bhushan,1990
2. Chemical–mechanical polishing of interlayer dielectric: A review;Ali;Solid State Technology,1994
3. Chemical mechanical polishing for planarization in manufacturing environment;Desai;Mat. Res. Soc. Symp. Proc.,1994
4. A bowl feed and double sides polishing for silicon wafer for VLSI;Nakamura;Bull. Japan Soc. Prec. Engng.,1985
5. Mirror polishing of silicon wafers (2nd report) — the effect of temperature distribution of Si wafers on their flatness and stock removal rate;Nakamura;Bull. Japan Soc. Prec. Engng.,1993