Optimisation of free-abrasive assisted lapping process with vitrified bonded diamond plates for sapphire substrates-Reference-Cited by-同舟云学术

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Optimisation of free-abrasive assisted lapping process with vitrified bonded diamond plates for sapphire substrates

Published:2024-03 Issue: Volume:86 Page:183-194
ISSN:0141-6359
Container-title:Precision Engineering
language:en
Short-container-title:Precision Engineering

Author:

Deng Jiayun,Xiong Qiang,Nie Xiaowei,Yan Qiusheng,Cao Jiyang,Lu Jiabin

Funder

National Natural Science Foundation of China

Natural Science Foundation of Guangdong Province

Publisher

Elsevier BV

Subject

General Engineering

Reference23 articles.

1. Chemical mechanical polishing for sapphire wafers using a developed slurry;Zhang;J Manuf Process,2021

2. Effects of polishing parameters on surface quality in sapphire double-sided CMP;Li;Ceram Int,2020

3. Study on geometrical patterns of textured fixed-abrasive pads in sapphire lapping based on trajectory analysis;Fang;Precis Eng,2018

4. Effect of material structure on spinel machinability in its fixed abrasive lapping;Zhankui;J Manuf Process,2021

5. A new process design for manufacturing sapphire wafers;Uhlmann;Precis Eng,2018

Cited by 3 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Study on the polishing performance and mechanism of sapphire wafers by different types of degradable surfactants;Surfaces and Interfaces;2024-09

2. Lapping performance of agglomerated diamond abrasives and analysis of sapphire processing process;Precision Engineering;2024-08

3. Recent Development of Abrasive Machining Processes Enhanced with Non-Newtonian Fluids;Coatings;2024-06-21

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