Effects of polishing parameters on surface quality in sapphire double-sided CMP-Reference-Cited by-同舟云学术

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Effects of polishing parameters on surface quality in sapphire double-sided CMP

Published:2020-06 Issue:9 Volume:46 Page:13356-13364
ISSN:0272-8842
Container-title:Ceramics International
language:en
Short-container-title:Ceramics International

Author:

Li Zhongyang,Deng Zhaohui,Hu Yangxuan

Funder

Natural Science Foundation of China

National Natural Science Foundation of China

Publisher

Elsevier BV

Subject

Materials Chemistry,Surfaces, Coatings and Films,Process Chemistry and Technology,Ceramics and Composites,Electronic, Optical and Magnetic Materials

Reference33 articles.

1. Investigation on ultra-precision lapping of A-plane and C-plane sapphires;Wan;Ceram. Int.,2019

2. Study of mechanochemical effect on wear and its application to surface finishing;Yasunaga;Res. Electrotech. Lab.,1977

3. The progress on polishing technology of sapphire substrate used in LED;Zhuo;Mach. Des. Manufact.,2013

4. Preparation of MgO doped colloidal SiO2 abrasive and their chemical mechanical polishing performance on c-, r- and a-plane sapphire substrate;Yin;Ceram. Int.,2018

5. Fe-Nx/C assisted chemical–mechanical polishing for improving the removal rate of sapphire;Xu;Appl. Surf. Sci.,2015

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1. Exploring the effectiveness of polyhydroxy complexing agents in sapphire chemical mechanical polishing: Combining experiments and theoretical calculation;Tribology International;2024-11

2. Chemical mechanical polishing of sapphire elucidated by densely discrete phase model and verified using atomic force microscopy;Tribology International;2024-09

3. Numerical analysis of influencing factors on wafer surface flatness in double-sided chemical mechanical polishing process;2024-03-12

4. Effects of disk size and position on material removal characteristic on double-sided polishing;Speckle 2023: VIII International Conference on Speckle Metrology;2024-03-04

5. Optimisation of free-abrasive assisted lapping process with vitrified bonded diamond plates for sapphire substrates;Precision Engineering;2024-03

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