Study on geometrical patterns of textured fixed-abrasive pads in sapphire lapping based on trajectory analysis-Reference-Cited by-同舟云学术

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Study on geometrical patterns of textured fixed-abrasive pads in sapphire lapping based on trajectory analysis

Published:2018-07 Issue: Volume:53 Page:169-178
ISSN:0141-6359
Container-title:Precision Engineering
language:en
Short-container-title:Precision Engineering

Author:

Fang Congfu,Liu Chong,Zhao Zaixing,Lin Yanfen,Hu Zhongwei,Xu Xipeng

Funder

National Natural Science Foundation of China

Natural Science Foundation of Fujian Province

Promotion Program for Young and Middle-aged Teacher in Science and Technology Research of Huaqiao University

Publisher

Elsevier BV

Subject

General Engineering

Reference21 articles.

1. Textured grinding wheels: a review;Li;Int J Mach Tools Manuf,2016

2. Effects of kinematic forms on material removal rate and non-uniformity in chemical mechanical planarization;Wang;Int J Mater Prod Technol,2008

3. Study on removal mechanism and removal characters for SiC and fused silica by fixed abrasive diamond pellets;Dong;Int J Mach Tools Manuf,2014

4. Effect of pad groove designs on the frictional and removal rate characteristics of ILD CMP;Rosales-Yeomans;J Electrochem Soc,2004

5. Influence of kinematics and abrasive configuration on the grinding process of glass;Sousa;J Mater Process Technol,2013

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1. Research on composite pattern design and lapping performance of fixed abrasive pads controlled by multi-physical fields;Precision Engineering;2024-12

2. Material removal and tool path ripple error of bonnet polishing using pads with different groove patterns;The International Journal of Advanced Manufacturing Technology;2024-05-08

3. Optimisation of free-abrasive assisted lapping process with vitrified bonded diamond plates for sapphire substrates;Precision Engineering;2024-03

4. Kinematics and trajectory analysis of swinging fixed abrasive plane lapping: Effect of swinging mode on the lapping uniformity;Precision Engineering;2024-03

5. Comparison of Different Optical Measurement Methods in the Evaluation of the Wear of Sls-Fabricated Tool Used for Free Abrasive Machining;2024

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