Material removal and tool path ripple error of bonnet polishing using pads with different groove patterns
Author:
Funder
National Science and Technology Council
Publisher
Springer Science and Business Media LLC
Link
https://link.springer.com/content/pdf/10.1007/s00170-024-13686-6.pdf
Reference35 articles.
1. Su X, Ji P, Jin Y et al (2019) Simulation and experimental study on form-preserving capability of bonnet polishing for complex freeform surfaces. Precis Eng 60:54–62. https://doi.org/10.1016/j.precisioneng.2019.07.010
2. Ren L, Zhang F, Liao D et al (2018) Theoretical model and experimental analysis of non-uniform material removal during full-aperture polishing. Int J Adv Manuf Technol 101:137–146. https://doi.org/10.1007/s00170-018-2924-7
3. Li J, Huang J, Hua C et al (2019) Design of surface grooves on a polishing pad based on slurry uniform flow. Int J Adv Manuf Technol 103:4795–4803. https://doi.org/10.1007/s00170-019-04026-0
4. Nie X, Li S, Hu H, Li Q (2014) Control of mid-spatial frequency errors considering the pad groove feature in smoothing polishing process. Appl Opt 53:6332–6339. https://doi.org/10.1364/AO.53.006332
5. Belkhir N, Bouzid D, Herold V (2012) Morphological behavior and wear of polyurethane pads used in glass polishing process. Precis Eng 36:641–649. https://doi.org/10.1016/j.precisioneng.2012.05.006
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