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Morphological behavior and wear of polyurethane pads used in glass polishing process

  • Published:2012-10 Issue:4 Volume:36 Page:641-649
  • ISSN:0141-6359
  • Container-title:Precision Engineering
  • language:en
  • Short-container-title:Precision Engineering

Author:

Belkhir N.,Bouzid D.,Herold V.

Publisher

Elsevier BV

Subject

General Engineering

Reference25 articles.

1. Material removal mechanisms in lapping and polishing;Evans;Annals of the CIRP,2004

2. Hambücker S. Technologie der Politur sphärischer Optiken mit Hilfe der Synchrospeed-Kinematik Dissertation. RWTH Aachen; 2001.

3. The role of abrasion in the optical polishing of metals and glasses;Brown,1984

4. Fabrication methods for precision optics;Karow,2004

5. Etude éllipsométrique du mécanisme fondamentale de polissage du verre;Sakata;Journal of Applied Physics,1973

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1. Effect of Secondary Foaming on the Structural Properties of Polyurethane Polishing Pad;Materials;2024-06-05

2. Material removal and tool path ripple error of bonnet polishing using pads with different groove patterns;The International Journal of Advanced Manufacturing Technology;2024-05-08

3. Review on high efficiency and high precision compliant polishing method;The International Journal of Advanced Manufacturing Technology;2024-04-01

4. Effect of Viscoelastic Characteristics on the Real Contact Area of Polishing Pad Surface;ECS Journal of Solid State Science and Technology;2024-04-01

5. Predicting Material Removal Rate in Chemical Mechanical Polishing (CMP) Using Explainable Machine Learning Methods;2024 Conference of Science and Technology for Integrated Circuits (CSTIC);2024-03-17
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