Study on the double-sided grinding of sapphire substrates with the trajectory method

Author:

Wang Lijuan,Hu Zhongwei,Fang Congfu,Yu Yiqing,Xu Xipeng

Funder

National Natural Science Foundation of China

Publisher

Elsevier BV

Subject

General Engineering

Reference27 articles.

1. Life-Cycle Assessment of Energy and Environmental Impacts of LED lighting Products Part 2: LED Manufacturing and Performance No.PNNL-21443;Scholand,2012

2. Design of double-sided polishing machine for functional crystal substrate;Yang;Adv Mater Res,2014

3. Machining process for sapphire substrates: a literature review proceeding of the institution of mechanical engineers;Li;Part B: J Eng Manuf,2011

4. Effects of kinematic variables on non-uniformity in chemical mechanical planarization;Hocheng;Int J Mach Tools Manuf,2000

5. Effect of process conditions on uniformity of velocity and wear distance of pad and substrate during chamical mechanical planarization;Kim;Electron Mater,2004

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